In-column detector for particle-optical column

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United States of America Patent

PATENT NO 9362086
APP PUB NO 20140097341A1
SERIAL NO

13975809

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Abstract

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The invention relates to an in-column back-scattered electron detector, the detector placed in a combined electrostatic/magnetic objective lens for a SEM. The detector is formed as a charged particle sensitive surface, preferably a scintillator disk that acts as one of the electrode faces forming the electrostatic focusing field. The photons generated in the scintillator are detected by a photon detector, such as a photo-diode or a multi-pixel photon detector. The objective lens may be equipped with another electron detector for detecting secondary electrons that are kept closer to the axis. A light guide may be used to offer electrical insulation between the photon detector and the scintillator.

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FEI COMPANYHILLSBORO OR 97124-5793

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hlavenka, Petr Brno, CZ 14 59
Sed'a, Bohuslav Blansko, CZ 13 39
Syta{hacek, over (r)} Petr Brno, CZ 3 8
Tůma, Lubomír Brno, CZ 3 8
{hacek, over (C)}e{hacek over (s)}ka Radek Brno, CZ 1 5

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