TECHNIQUE FOR UNIFORM CMP
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United States of America Patent
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Issued Date -
Apr 10, 2014
app pub date -
Jun 26, 2013
filing date -
Oct 8, 2012
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Abandoned
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Abstract
Pitch-dependent dishing and erosion following CMP treatment of copper features is quantitatively assessed by atomic force microscopy (AFM) and transmission electron microscopy (TEM). A new sequence of processing steps presented herein is used to prevent dishing and to reduce significantly the local pitch- and pattern density-induced CMP non-uniformity for copper metal lines having widths and spacing in the range of about 32-128 nm. The new process includes a partial copper deposition step followed by deposition of a silicon carbide/nitride (SiCxNy) blocking layer. A multi-step CMP process planarizes areas of the resulting irregular surface that have narrow features, while the blocking layer protects areas that have wide features.
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