MOVABLE LAYER DESIGN FOR STRESS CONTROL AND STIFFNESS REDUCTION
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United States of America Patent
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Issued Date -
Apr 10, 2014
app pub date -
Oct 4, 2012
filing date -
Oct 4, 2012
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Abandoned
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Abstract
Systems, methods and apparatuses reduce stress and/or reduce stiffness in a movable layer of an electromechanical systems (EMS) device. Stress or stiffness can be reduced by including one or more compressive stress layers to compensate for the tensile stress exhibited by other layers of the movable layer. The movable layer can include a dielectric core with a first tensile stress layer and a first compressive stress layer on a first side of the dielectric core, and a second tensile stress layer and a second compressive stress layer on a second side of the dielectric core.
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