Systems and methods for providing temperature stability of acousto-optic beam deflectors and acousto-optic modulators during use
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United States of America Patent
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May 19, 2015
Grant Date -
Apr 10, 2014
app pub date -
Oct 18, 2013
filing date -
Jul 5, 2011
priority date (Note) -
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Abstract
The invention provides a method of laser processing with a thermally stabilized acousto-optic beam deflector. The method includes the steps of: generating a sequence of RF pulses corresponding to a sequence of laser pulses having a laser pulse repetition rate, the RF pulses including transmitting RF pulses at transmitting RF frequencies and non-transmitting RF pulses at non-transmitting RF frequencies for causing the sequence of laser pulses to be deflected in respective transmitting and non-transmitting directions, each RF pulse comprising an RF frequency, an RF amplitude and a duration; controlling each RF pulse such that the sequence of RF pulses provides a modulated RF drive signal that is modulated to provide a balanced thermal loading on the acousto-optic deflector; applying the modulated RF drive signal to the acousto-optic deflector; and deflecting at least one laser pulse with the acousto-optic deflector using the modulated RF drive signal to irradiate a selected target position with a predetermined pulse energy.
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