Delamination drying apparatus and method

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United States of America Patent

PATENT NO 8898928
SERIAL NO

13650044

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Abstract

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An apparatus for delamination drying a substrate is provided. A chamber for receiving a substrate is provided. A chuck supports and clamps the substrate within the chamber. A temperature controller controls the temperature of the substrate and is able to cool the substrate. A vacuum pump is in fluid connection with the chamber. A tilting mechanism is able to tilt the chuck at least 90 degrees.

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Patent Owner(s)

  • LAM RESEARCH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hymes, Diane San Jose, US 13 100
Limary, Ratchana Austin, US 7 44
Schoepp, Alan M Ben Lemond, US 39 1428
Sirard, Stephen M Austin, US 19 108

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