APPARATUS FOR WASHING OBJECT TO BE WASHED
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United States of America Patent
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Issued Date -
Apr 17, 2014
app pub date -
Jan 10, 2012
filing date -
Mar 17, 2011
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
[Problem] Since a working chamber for performing an operation of washing an object to be washed is provided so as to move vertically in a washing tank and be separated from the washing tank and airtightly shut off, a minimal space required for an operation of washing the object to be washed such as drying under reduced pressure can be provided, and drying under reduced pressure can be efficiently performed in the presence of washing liquid or washing vapor in the washing tank without unnecessary burden on a reduced pressure system.
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