Charged particle beam lens having a particular support electrically insulating first and second electrodes from each other
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United States of America Patent
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Sep 9, 2014
Issued Date -
N/A
app pub date -
May 10, 2012
filing date -
Jun 14, 2011
priority date (Note) -
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Abstract
A charged particle beam lens includes a first electrode including a surface having at least one aperture and a second electrode including a surface having at least one aperture. A support intervenes between the first electrode and the second electrode to electrically insulate the first and second electrodes from each other and to support the first and second electrodes in a predetermined positional relationship. A side surface of the support intervenes between the first electrode and the second electrode and includes a non-flat portion having at least one of a projected portion and a depressed portion, and includes a tapered portion. A taper angle formed by the tapered portion and the surface having the aperture of the second electrode is greater than zero degree and less than ninety degrees.
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