Mass Flow Controller Driven by Smart Material Actuator with Mechanical Amplification
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United States of America Patent
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Issued Date -
Apr 24, 2014
app pub date -
Jul 2, 2012
filing date -
Jul 2, 2011
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An improved mass flow controller with a body having an inlet and an outlet; a sensor adapted to sense the flow of material out of the outlet; a controller adapted to receive a signal from the sensor; a proportional valve operatively connected between the inlet and the outlet; and a mechanically-amplified smart material actuator electrically connected to the controller and operatively connected to the proportional valve. The mechanically-amplified actuator comprises a smart material device, a compensator, a movable supporting member, at least two mechanical webs, at least two actuating arms, and a second stage assembly.
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