MONOLITHIC SENSOR PACKAGE

United States of America Patent

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Issued Date
May 15, 2014
app pub date
Nov 12, 2012
filing date
Nov 12, 2012

priority date (Note)
Abandoned

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Abstract

A unitary sensor package having a magnetometer, accelerometer and gyroscope incorporated into a monolithic structure composed of one or more wafers or substrates. Pressure and/or other types of sensors can also be incorporated in the monolithic structure.

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Patent Owner(s)

Patent Owner	Address
MEMSIC INC	ONE TECHNOLOGY DRIVE SUITE 325 ANDOVER MA 02109

International Classification(s)

G01D:MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VAR....

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[Patents Count]

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Cai, Yongyao	Acton, US	31	174
Zavracky, Paul M	Boston, US	60	6749
Zhao, Yang	Andover, US	432	4884

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MONOLITHIC SENSOR PACKAGE

Number of patents in Portfolio can not be more than 2000

United States of America Patent

13674506

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APP PUB NO	20140130595A1
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13674506

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