LIGHTING APPARATUS FOR MEASURING ELECTRONIC MATERIAL-PROCESSED PART AND TEST APPARATUS USING THE SAME
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United States of America Patent
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Issued Date -
May 15, 2014
app pub date -
Jan 15, 2013
filing date -
Nov 13, 2012
priority date (Note) -
Abandoned
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Abstract
The present invention relates to lighting apparatus for measuring an electronic material-processed part and the test apparatus using the same. The lighting apparatus includes a dome reflection plate 12 disposed over the subject of measurement and configured to have a dome form, have a light inflow window 11 through which coaxial illumination enters or exits formed at a central part of a highest end of the dome reflection plate 12, and have incident light reflected in all directions within the dome; a plurality of dome illumination lamps 13 disposed at lower edge portions of the dome reflection plate 12 and configured to illuminate the inside of the dome; and a camera 20 disposed right over the light inflow window 11 for the coaxial illumination of the dome reflection plate 12. The lighting apparatus illuminates a processing part, that is, the subject of measurement.
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