Contactor devices with carbon nanotube probes embedded in a flexible film and processes of making such

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United States of America Patent

PATENT NO 10266402
APP PUB NO 20140139250A1
SERIAL NO

13681967

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Abstract

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Electrically conductive columns of intertwined carbon nanotubes embedded in a mass of material flexible, resilient electrically insulating material can be used as electrically conductive contact probes. The columns can extend between opposing sides of the mass of material. Terminals of a wiring substrate can extend into the columns and be electrically connected to an electrical interface to a tester that controls testing of a device under test. A pair of physically interlocked structures can coupling the mass of material to the wiring substrate. The pair can include a receptacle and a protrusion.

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Patent Owner(s)

  • FORMFACTOR, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eldridge, Benjamin N Livermore, US 256 13736
Slocum, Alexander Bow, US 35 526
Yaglioglu, Onnik Livermore, US 17 124

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