Modular prober and method for operating same
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United States of America Patent
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Nov 24, 2015
Issued Date -
N/A
app pub date -
Sep 2, 2011
filing date -
Sep 3, 2010
priority date (Note) -
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Abstract
The invention relates to a prober for checking and testing electronic semiconductor components and methods of using the same. The prober comprises at least two checking units, each of which is equipped with a chuck, probes, and a positioning unit, and each of which is assigned to a machine control system and a process control system. The prober further comprises a loading unit for automatically loading both testing units and an additional loader for manually loading at least one of the testing units, a user interface, and a module control system for controlling the process control systems and/or the machine control systems and the loading unit. The user interface can optionally be connected to at least one of the process control systems or the module control system by means of a switching device of the prober.
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