ROLL-TO-ROLL SPUTTERING METHOD
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United States of America Patent
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Issued Date -
Jun 5, 2014
app pub date -
Dec 2, 2013
filing date -
Dec 3, 2012
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Abstract
A roll-to-roll sputtering method transports a flexible substrate wound on an unwinder roll to a depositing part, forms a deposited film on the flexible substrate, and winds the flexible substrate on a winder roll. The depositing part includes a first depositing part. The first depositing part includes a first sputtering part which deposits a first target material on one surface of the flexible substrate and a heater which is disposed at a side of the other surface of the flexible substrate to heat the flexible substrate.
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