LID OPENING/CLOSING SYSTEM FOR CLOSED CONTAINER, AND SUBSTRATE PROCESSING METHOD USING THE SAME
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
Dec 3, 2013
filing date -
Dec 4, 2012
priority date (Note) -
Published
status (Latency Note)
Importance
Abstract
The partial pressure of an oxidizing gas within a FOUP fixed to a FIMS system and placed in an open state is prevented from increasing with the lapse of time. To that end, a gas supply port is arranged in the bottom face of the FOUP to enable nitrogen supply into the FOUP through the gas supply port with a pod mounted on the FIMS system. A nitrogen supply system for supplying nitrogen with the FOUP mounted is controlled so as to make a nitrogen supply at such a low flow rate and pressure as to be able to prevent dust or the like having such sizes as to possibly cause problems in wiring lines to be formed on a wafer from being stirred up from the gas supply port or the like.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully