MEMS ELEMENT, ELECTRONIC DEVICE, ALTIMETER, ELECTRONIC APPARATUS, AND MOVING OBJECT
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United States of America Patent
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Issued Date -
Jun 12, 2014
app pub date -
Dec 4, 2013
filing date -
Dec 11, 2012
priority date (Note) -
Abandoned
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Abstract
A MEMS element includes a substrate and a plurality of resonators which are formed above a first surface of the substrate, the substrate includes at least one flexible portion and at least one non-flexible portion, and resonators corresponding to the flexible portion and the non-flexible portion are disposed.
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