APPARATUS FOR ELECTROCHEMICAL DEPOSITION OF A METAL
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United States of America Patent
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Issued Date -
Jun 12, 2014
app pub date -
Jul 20, 2012
filing date -
Jul 20, 2011
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Abandoned
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Abstract
The invention as described in the following relates to an apparatus for the electrochemical deposition of a metal on a substrate, which apparatus is capable of refreshing an electrolyte used for the deposition in a continuous way. Furthermore, the invention as described relates to a method of refreshing an electrolyte for the electrochemical deposition of a metal on a substrate.
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