OPTICAL COMPONENT WITH BLOCKING SURFACE AND METHOD THEREOF
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United States of America Patent
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app pub date -
Dec 9, 2013
filing date -
Dec 11, 2012
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Abandoned
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Abstract
An optical component arranged for use in a low pressure environment including: a surface arranged to receive extreme ultra-violet (EUV) light and a coating, on the surface, arranged to block at least one contaminant in the low pressure environment from binding to the surface. A method of mitigating contamination of a surface of an optical component, including: inserting the optical component into a chamber for a semi-conductor inspection system, controlling a temperature and a pressure within the chamber, introducing a blocking material, in a gaseous state, into the chamber, coating a surface of the optical component with the blocking material, and preventing, using the coating, a contaminant in the chamber from binding to the optical component.
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