Zn-Si-O-BASED OXIDE SINTERED BODY, METHOD FOR PRODUCING THE SAME, AND TRANSPARENT CONDUCTIVE FILM
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United States of America Patent
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Issued Date -
Jun 12, 2014
app pub date -
Jul 3, 2012
filing date -
Sep 22, 2011
priority date (Note) -
Abandoned
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Abstract
[Object] Provided are: a Zn—Si—O-based oxide sintered body, which suppresses abnormal discharge and so forth when used as a sputtering target, or suppresses a splash phenomenon when used as a tablet for vapor deposition; a method for producing the Zn—Si—O-based oxide sintered body; and the like.
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