SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME

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United States of America Patent

SERIAL NO

14178781

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Abstract

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A semiconductor device includes plural electrode pads arranged in an active region of a semiconductor chip, and wiring layers provided below the plural electrode pads wherein occupation rates of wirings arranged within the regions of the electrode pads are, respectively, made uniform for every wiring layer. To this end, in a region where an occupation rate of wiring is smaller than those in other regions, a dummy wiring is provided. On the contrary, when the occupation rate of wiring is larger than in other regions, slits are formed in the wiring to control the wiring occupation rate. In the respective wirings layers, the shapes, sizes and intervals of wirings below the respective electrode pads are made similar or equal to one another.

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Patent Owner(s)

Patent OwnerAddress
RENESAS ELECTRONICS CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
EBATA, Yutaro Mito, JP 8 108
FUJISHIMA, Koji Kofu, JP 9 101
FUKAYAMA, Yoshio Ichinomiya, JP 11 138
HIGUCHI, Kazuhisa Tachikawa, JP 30 321
KANAOKA, Taku Hitachinaka, JP 11 116
SAHARA, Masashi Hitachinaka, JP 37 602

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