CHARGED PARTICLE BEAM LENS AND EXPOSURE APPARATUS USING THE SAME
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United States of America Patent
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Issued Date -
Jun 19, 2014
app pub date -
Mar 14, 2012
filing date -
Mar 15, 2011
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
An electrostatic charged particle beam lens includes an electrode including a flat plate having a first surface having a normal line extending in a direction of an optical axis and a second surface opposite to the first surface, the electrode having a through-hole extending from the first surface to the second surface. A circularity in a first region that is on the first surface side and a circularity in a second region that is on the second surface side are each better than a circularity in a third region that is a region in the electrode disposed between the first surface and the second surface.
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