MICROMACHINED METAL DIAPHRAGM BASED FABRY-PEROT FIBEROPTIC SENSOR SYSTEM AND DATA PROCESSING INVOLVING THE SAME
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United States of America Patent
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Issued Date -
Jun 19, 2014
app pub date -
Dec 28, 2010
filing date -
Dec 28, 2010
priority date (Note) -
Abandoned
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Abstract
The present invention relates to micro machined metal diaphragm for Fabry-Perot interferometer sensor and Fabry Perot Fiber optic Sensor system using said metal diaphragm and method of fabrication thereof. Fabry Perot sensor with micro machined metallic diaphragms at the fiber optic end is developed ensuring accuracy, controllability by deterministic process. Advantageously, the system involves the metal diaphragm with high reflectivity inside surface facing the fiber end as a basic functional element. Importantly, the micro machined metal diaphragm is miniaturized to suit various critical applications including bio medical sensing devices for measuring various physiological parameters with desired accuracy. The metallic diaphragm based Fabry-Perot fiber optic sensor is directed to favour wide scale applications such as for measuring various parameters in nuclear industry, Chemical and Electrically harsh industry, biomedical applications with desired precision and favorable performance largely unaffected by radiation, high temperature or highly corrosive environment at work/application.
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