CARBON AS GRAZING INCIDENCE EUV MIRROR AND SPECTRAL PURITY FILTER

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20140168758A1
SERIAL NO

13839570

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A mirror for reflecting extreme ultraviolet light (EUV) comprising: a substrate layer; and an upper layer above the substrate layer, that reflects EUV wavelengths and refracts longer wavelengths, said upper layer being dense and hard carbon having an Sp2 to Sp3 carbon bond ratio of 0 to about 3 and a normal incidence EUV mirror comprising an optical coating on an uppermost surface which permits transmission of EUV and protects the surface from environmental degradation, said coating being dense and hard and having an Sp2 carbon bond ratio of 0 to about 3 and a thickness of 0.1 to about 5 nanometers. The invention also includes EUV mirror systems protected by a dense carbon layer and includes a multilayer EUV reflecting system having an out of band absorbing layer.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
KLA-TENCOR CORPORATIONONE TECHNOLOGY DRIVE MILPITAS CA 95035

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Delgado, Gildardo Livermore, US 27 96
Rose, Garry Livermore, US 6 14
Zhang, Qiang San Jose, US 447 2087
Zhuang, Guorong Vera Santa Clara, US 4 95

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation