HIGH-TEMPERATURE GRADE STEEL FOR FLUIDIZED BED REACTOR EQUIPMENT
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United States of America Patent
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Issued Date -
Jun 26, 2014
app pub date -
Dec 17, 2013
filing date -
Dec 21, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
Embodiments of a reaction chamber liner for use in a heated silicon deposition reactor are disclosed. The liner has an upper portion, a mid portion comprising a material other than a stainless steel alloy, and a lower portion comprising a martensitic stainless steel alloy. The liner's upper portion may have a composition substantially similar to the lower portion.
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