HIGH FLOW XEF2 CANISTER
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
Jun 26, 2014
app pub date -
Dec 21, 2012
filing date -
Dec 21, 2012
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
This disclosure provides systems, methods and apparatus for delivery of gas from solid phase sources. A solid phase gas source canister can include multiple separated volumes configured to contain multiple quantities of a solid phase gas source. Sublimated vapor can be independently produced by each quantity of the solid phase gas source. In some implementations, the solid phase gas source canisters are configured for simultaneous fill of the multiple volumes with a solid source gas phase powder.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully