Importance

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Abstract

Systems, methods and apparatus for fabricating devices use an inductively-coupled plasma. An inductively coupled plasma system includes a reaction chamber including a reaction space and a coil chamber. The system includes a workpiece support within the reaction space. The system includes a first inductive coil section and a second inductive coil section, the first and second inductive coil sections being independently movable. At least one power source is coupled to the first and second inductive coil sections. The first and second inductive coil sections and the at least one power source are configured to induce an inductively coupled plasma (ICP) in the reaction space. An adjustment mechanism is configured to move the first inductive coil section relative to the second inductive coil section.

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First Claim