MAGNETORESISTIVE MEMORY DEVICE AND FABRICTAION METHOD

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United States of America Patent

APP PUB NO 20140175580A1
SERIAL NO

14056046

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A magnetoresistive memory device and a fabrication method are provided. A first dielectric layer disposed on a semiconductor substrate can include a groove formed therein. A cobalt metal layer can be formed over a bottom surface and a sidewall surface of the groove. A first metal layer can be formed over the cobalt metal layer. The first metal layer can fill the groove and be used as a first programming line of the magnetoresistive memory device. A second dielectric layer can be formed over the first dielectric layer and over the first metal layer. A magnetic tunnel junction can be formed over the second dielectric layer. The magnetic tunnel junction can be positioned corresponding to a position of the first metal layer. The magnetic tunnel junction can include an insulating layer sandwiched between a lower magnetic material layer and an upper magnetic material layer.

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Patent Owner(s)

Patent OwnerAddress
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONSHANGHAI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
CHEN, WENFU Shanghai, CN 4 66
HE, PAUL Shanghai, CN 1 7
SHI, SEN Shanghai, CN 1 7
ZHANG, ALFRED Shanghai, CN 14 28

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