Acoustic resonator comprising aluminum scandium nitride and temperature compensation feature

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United States of America Patent

PATENT NO 9590165
APP PUB NO 20140175950A1
SERIAL NO

14194074

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Abstract

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An acoustic resonator structure comprises a first electrode disposed on a substrate, a piezoelectric layer disposed on the first electrode and comprising aluminum scandium nitride, a second electrode disposed on the piezoelectric layer, and a temperature compensation feature having a temperature coefficient offsetting at least a portion of a temperature coefficient of the piezoelectric layer, the first electrode, and the second electrode.

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Patent Owner(s)

  • AVAGO TECHNOLOGIES GENERAL IP (SINGAPORE) PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burak, Dariusz Fort Collins, US 75 1733
Choy, John Westminster, US 64 2228
Feng, Chris Fort Collins, US 41 1251
Grannen, Kevin J Thornton, US 59 1188
Lamers, Tina L Fort Collins, US 5 135
Nikkel, Phil Loveland, US 51 1511
Yeh, Tangshiun Fort Collins, US 13 395
Zou, Qiang Fort Collins, US 27 460

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