DEPOSITION APPARATUS AND METHOD
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United States of America Patent
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Issued Date -
Jun 26, 2014
app pub date -
Dec 21, 2012
filing date -
Dec 21, 2012
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method for filling features in a layer over a substrate is provided. A dispersion of nanoparticles less than 5 nm is placed on the layer. The liquid is frozen by lowering a temperature of the liquid. The frozen liquid is sublimated by decreasing pressure and subsequently heating the frozen liquid, wherein the nanoparticles are not sublimated.
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