PROTECTIVE COATING TO PREVENT REACTION BETWEEN GRAPHITE SUSCEPTOR AND QUARTZ CRUCIBLE

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United States of America Patent

APP PUB NO 20140182511A1
SERIAL NO

14141101

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A susceptor for supporting a crucible includes a body with an interior surface defining a cavity. A coating is disposed on the interior surface to provide a barrier for preventing contact between the body of the susceptor and the crucible disposed within the cavity.

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Patent Owner(s)

Patent OwnerAddress
SUNEDISON SEMICONDUCTOR LIMITED (UEN201334164H)9 BATTERY ROAD #15-01 STRAITS TRADING BUILDING SINGAPORE 049910

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Phillips, Richard J St. Peters, US 50 736
Rathod, Shailendra B St. Louis, US 10 30

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