Signal path and method of manufacturing a multiple-patterned semiconductor device

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United States of America Patent

PATENT NO 9099462
APP PUB NO 20140183603A1
SERIAL NO

13788049

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Abstract

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A multiple-patterned semiconductor device and a method of manufacture are provided. The semiconductor device includes one or more layers with signal tracks. The signal tracks have a quality characteristic. The semiconductor device also includes repeater banks to repower signals. The method of manufacture includes defining portions of layers with photomasks having signal track patterns, determining a quality characteristic of the signal track patterns, and selecting a photomask for etching vias.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINES CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Allen, David H Rochester, US 31 1202
Dewanz, Douglas M Rochester, US 17 70
Paulsen, David P Dodge Center, US 98 600
Sheets,, II John E Zumbrota, US 133 571

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