RESONANT SENSOR WITH ASYMMETRIC GAPPED CANTILEVERS
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United States of America Patent
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Issued Date -
Jul 3, 2014
app pub date -
Mar 25, 2011
filing date -
Mar 26, 2010
priority date (Note) -
Abandoned
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Abstract
A resonant sensor is provided. The resonant sensor may have a structure including a base portion, a mass portion, and a mechanical beam connecting the base portion to the mass portion. In addition, the structure may include a first sensing beam formed from a sensing material responsive to mechanical strain where a gap is formed between the sensing beam and the mechanical beam.
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