Modified via bottom for BEOL via efuse

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United States of America Patent

PATENT NO 8921167
APP PUB NO 20140183688A1
SERIAL NO

13732466

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A method of forming an electronic fuse including providing an Mx level including a first Mx metal, a second Mx metal, and an Mx cap dielectric above of the first and second Mx metal, forming an Mx+1 level above the Mx level, the Mx+1 level including an Mx+1 metal and a via electrically connecting the second Mx metal to the Mx+1 metal in a vertical orientation, and forming a nano-pillar from the Mx cap dielectric at a bottom of the via and above the second Mx metal, the nano-pillar having a height less than a height of the via.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bao, Junjing Cedar Grove, US 99 513
Bonilla, Griselda Fishkill, US 107 1073
Choi, Samuel S Beacon, US 48 408
Filippi, Ronald G Wappingers Falls, US 99 1178
Lustig, Naftali E Croton-on-Hudson, US 59 1488
Simon, Andrew H Fishkill, US 104 1611

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