Arrays of silicon structures including metal silicide regions, and related semiconductor device structures
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United States of America Patent
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Dec 29, 2015
Grant Date -
Jul 3, 2014
app pub date -
Mar 6, 2014
filing date -
Feb 21, 2012
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Abstract
A method of forming a metal silicide region. The method comprises forming a metal material over and in contact with exposed surfaces of a dielectric material and silicon structures protruding from the dielectric material. A capping material is formed over and in contact with the metal material. The silicon structures are exposed to heat to effectuate a multidirectional diffusion of the metal material into the silicon structures to form a first metal silicide material. The capping material and unreacted portions of the metal material are removed. The silicon structures are exposed to heat to substantially convert the first metal silicide material into a second metal silicide material. A method of semiconductor device fabrication, an array of silicon structures, and a semiconductor device structure are also described.
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