SYSTEMS AND METHODS FOR ROTATIONAL ALIGNMENT OF A DEVICE UNDER TEST

Number of patents in Portfolio can not be more than 2000

United States of America Patent

APP PUB NO 20140184003A1
SERIAL NO

14141749

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Systems and methods for rotational alignment of a device under test are disclosed herein. These systems include a chuck that includes a rotational positioning assembly that includes a lower section and an upper section that is configured to selectively rotate relative to the lower section about a rotational axis. The rotational positioning assembly further includes a first bearing that is configured to support a radial load between the upper section and the lower section and a second bearing that is configured to support a thrust load between the upper section and the lower section. The methods include providing a fluid stream to the second bearing to permit rotation of the upper section relative to the lower section, rotating the upper section relative to the lower section, and ceasing the providing the fluid stream to the second bearing to restrict rotation of the upper section relative to the lower section.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
CASCADE MICROTECH INC9100 SW GEMINI DRIVE BEAVERTON OR US 97008

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kiesewetter, Jorg Thiendorf OT Sacka, DE 20 84
Stoll, Karsten Sohland an der Spree, DE 12 73

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation