In-Line Transistor Bandwidth Measurement

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United States of America Patent

APP PUB NO 20140184242A1
SERIAL NO

13732474

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Abstract

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A method and apparatus measure transistor bandwidth of a device under test in-line and on-wafer. The method includes disposing a measurement circuit on a chip within a wafer, the measurement circuit including a ring oscillator generating an oscillation frequency for transition through the device under test on the wafer, and obtaining an amplitude gain based on the measurement circuit for the corresponding frequency.

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Patent Owner(s)

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GLOBALFOUNDRIES U S INC400 STONEBREAK ROAD EXTENSION MALTA NY 12020

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hedberg, Erik L Essex Junction, US 42 2211
Kim, Daeik D West Lafayette, US 11 142
Lea, Dallas M Poughkeepsie, US 2 4
Sutton, Akil K Fishkill, US 5 22
Zier, Steven J Hopewell Junction, US 18 193

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