TRANSISTOR AND FABRICATION METHOD

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United States of America Patent

APP PUB NO 20140191301A1
SERIAL NO

14087002

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Transistors and fabrication methods are provided. A first sidewall can be formed on each sidewall of a gate structure. A second sidewall can be formed on the first sidewall. The first sidewall can be made of a doped material. After forming a source and a drain, a metal silicide layer can be formed on the source and the drain. The second sidewall can be removed to expose a surface portion of the semiconductor substrate between the metal silicide layer and the first silicide layer. A stress layer can be formed on the exposed surface portion of the semiconductor substrate, on the metal silicide layer, on the first sidewall, and on the gate.

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Patent Owner(s)

Patent OwnerAddress
SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATIONSHANGHAI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
HE, YONGGEN Shanghai, CN 13 80
HE, YOUFENG Shanghai, CN 8 33

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