Splashguard and Inlet Diffuser for High Vacuum, High Flow Bubbler Vessel
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United States of America Patent
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Issued Date -
Jul 10, 2014
app pub date -
Mar 12, 2014
filing date -
Dec 15, 2006
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
The present invention is a bubbler having a diptube inlet ending in a bubble size reducing outlet and at least one baffle disc positioned between the outlet of the diptube and the outlet of the bubbler to provide a narrow annular space between the baffle disc and the wall of the bubbler to prevent liquid droplets from entering the outlet to the bubbler. The bubble size reducing outlet is an elongated cylindrical porous metal frit situated in a sump of approximately the same dimensions. A metal frit is placed at the inlet of the outlet of the bubbler. The present invention is also a process of delivering a chemical precursor from a bubbler vessel having the above structure.
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