Method for manufacture of a multi-layer plate device

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United States of America Patent

PATENT NO 9556074
SERIAL NO

13682171

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Abstract

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A method for the joining of ceramic pieces with a hermetically sealed joint comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material is controlled by the selection of the joining material, the joining temperature, the time at temperature, the joining atmosphere, and other factors. The ceramic pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material is adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.

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Patent Owner(s)

  • COMPONENT RE-ENGINEERING COMPANY, INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Balma, Frank Los Gatos, US 28 584
Elliot, Alfred Grant Palo Alto, US 24 465
Elliot, Brent Donald Alfred Cupertino, US 20 465
Rex, Dennis George Williams, US 24 502
Schuster, Richard Erich Milpitas, US 19 462
Veytser, Alexander Mountain View, US 27 625

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