Method of analyzing a sample and charged particle beam device for analyzing a sample

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United States of America Patent

PATENT NO 9159532
APP PUB NO 20140197310A1
SERIAL NO

14150012

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.

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Patent Owner(s)

  • CARL ZEISS MICROSCOPY LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bean, Stewart Wyton, GB 8 58
Hill, Edward St. Ives, GB 19 595

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