CHARGED PARTICLE BEAM WRITING METHOD
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United States of America Patent
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Issued Date -
Jul 17, 2014
app pub date -
Jan 7, 2014
filing date -
Jan 16, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A charged particle beam writing method comprising, an irradiation step of irradiating a sample with a charged particle beam emitted from a charged particle source, a first blanking step of performing the blanking while the charged particle beam is moved in a first direction from a position of the charged particle beam in the irradiation step; and a second blanking step of performing the blanking the charged particle beam is moved in a second direction opposite to the first direction from the position of the charged particle beam in the irradiation step.
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