Hybrid conductor through-silicon-via for power distribution and signal transmission
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United States of America Patent
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Jul 29, 2014
Grant Date -
Jul 17, 2014
app pub date -
Jan 15, 2013
filing date -
Jan 15, 2013
priority date (Note) -
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Abstract
A method of providing signal, power and ground through a through-silicon-via (TSV), and an integrated circuit chip having a TSV that simultaneously provides signal, power and ground. In one embodiment, the method comprises forming a TSV through a semiconductor substrate, including forming a via in the substrate; and forming a multitude of conductive bars in the via. The multitude of conductive bars include at least one signal bar, at least one power bar, and at least one ground bar. The method further comprises connecting the at least one power bar to a power voltage source to apply power through the TSV; connecting the at least one ground bar to a ground voltage; and connecting the at least one signal bar to a source of an electronic signal to conduct the signal through the TSV and to form a hybrid power-ground-signal TSV in the substrate.
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