FABRY-PEROT DEVICE WITH A MOVABLE MIRROR
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United States of America Patent
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N/A
Issued Date -
Jul 17, 2014
app pub date -
Jan 13, 2014
filing date -
Jan 11, 2013
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A Fabry-Perot tunable filter (FPTF) includes a top mirror having a first surface for receiving light and a second surface opposite the first surface. A movable mirror having a front side is secured to the second surface of the top mirror and includes back side. The movable mirror includes an inner bend resistant portion, wherein the front side includes a flexible front side portion outside the inner bend resistant portion recessed relative to the inner bend resistant portion, and a front side outer bend resistant portion thicker than the flexible front side portion. The back side includes a flexible back side portion outside the inner bend resistant portion and a back side outer bend resistant portion thicker than the flexible back side portion. An actuator mechanically coupled to the back side of the movable mirror moves the inner bend resistant portion relative to the second surface of the top mirror.
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