TEMPLATE, MANUFACTURING METHOD OF THE TEMPLATE, AND POSITION MEASURING METHOD IN THE TEMPLATE
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United States of America Patent
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Issued Date -
Jul 24, 2014
app pub date -
Apr 23, 2013
filing date -
Jan 24, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
According to one embodiment, provided is a template in which a transfer region on which a first pattern to be transferred to a processing target is arranged and a non-transfer region surrounding the transfer region are formed on a principal surface of a template substrate. The template includes a second pattern used to measure deviation of a pattern formed on the template substrate from a design position in at least the transfer region. The second pattern arranged on the transfer region is not transferred to the processing target when a transfer to the processing target is performed through an imprint material.
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