RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
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United States of America Patent
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Issued Date -
Aug 7, 2014
app pub date -
Jul 27, 2012
filing date -
Sep 2, 2011
priority date (Note) -
Abandoned
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Abstract
A radiation source comprises a nozzle configured to direct a stream of fuel droplets (400) along a trajectory towards a plasma formation location and a laser configured to direct laser radiation to the plasma formation location to convert the fuel droplets at the plasma formation location into a plasma. The laser comprises an amplifier (310, 320) and an optical element (500) configured to define a divergent beam path for radiation passing through the amplifier.
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