MEASUREMENT APPARATUS AND METHOD OF MANUFACTURING ARTICLE
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United States of America Patent
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Issued Date -
Aug 7, 2014
app pub date -
Feb 3, 2014
filing date -
Feb 5, 2013
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a measurement apparatus which measures a position of a surface to be measured, comprising a light detection unit configured to detect light reflected by the surface to be measured, a confocal optical system configured to irradiate the surface to be measured with light and guide the light traveling from the surface to be measured to the light detection unit, and a control unit configured to determine a position of the surface to be measured, based on an output from the light detection unit, wherein the control unit obtains a plurality of signals to be used for determining the position of the surface to be measured, selects one of the plurality of signals, and obtains the position of the surface to be measured, based on the selected signal.
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