Vacuum storage method and device for crystalline material

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9250014
APP PUB NO 20140223763A1
SERIAL NO

14240844

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Abstract

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The present invention provides a method for storing a raw material inside a mold or a crucible, comprising the steps of: closing an opening of the mold filled with the raw material of a sintered metal or an opening of the crucible filled with the raw material for encouraging growth of a crystal for a semiconductor of a gallium arsenide crystal and a silicon single crystal or a polycrystalline silicon by a cap provided with a supply pipe and a vacuum evacuation pipe; vacuuming the inside the mold or crucible to a high vacuum state of 10−4 torr or less via the vacuum evacuation pipe; drying by heating the raw material in the mold or crucible filled with a heated inert gas in the range of 50 C. to 200 C. via the supply pipe; and storing the raw material in the mold or the crucible covered with the cap.

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI MATERIALS TECHNO CORPORATIONTOKYO 102-8205

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Horioka, Yukichi Noda, JP 4 6
Kajiwara, Jiro Tokyo, JP 22 550
Sanada, Hirotsugu Tokyo, JP 1 2

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