Modular Exhaust Gas Header And Method Of Incorporating Same In Design Layout For A Manufacturing Process Machine
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
N/A
Issued Date -
N/A
app pub date -
Apr 14, 2014
filing date -
Jul 11, 2008
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A modular exhaust gas header designed for use with a process tool having a plurality of exhaust gas points of connection. Embodiments of the modular exhaust gas header include a plurality of branch ducts, at least one for each point of connection in the process tool. Branch ducts, and primary ducts with which they are fluidly connected, may be made from materials designed to withstand exhaust gases that have a high temperature, are corrosive, and/or include volatile solvents. If desired, flow control devices and pressure monitoring instrumentation that selectively measures pressure may be used in each branch duct. The header local to the processing system may be incorporated in a method of designing a layout for a manufacturing process tool and associated exhaust gas handling systems.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully