Methods and apparatus for detection of gaseous corrosive contaminants

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United States of America Patent

PATENT NO 9575040
APP PUB NO 20140230524A1
SERIAL NO

14265623

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Abstract

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A corrosion sensor includes a plurality of metal strips having different thicknesses. A first metal strip with the least thickness is first employed to provide sensitive corrosion detection. After an exposed portion of the first metal strip is consumed, a second metal strip having a second least thickness can be employed to provide continued sensitive corrosion detection employing a remaining un-corroded portion of the second metal strip. The plurality of metal strips can be sequentially employed as exposed portions of thinner metal strips become unusable through complete corrosion and un-corroded exposed portions of thicker metal strips become thin enough to provide sensitive corrosion detection.

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Patent Owner(s)

  • GLOBALFOUNDRIES INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chey, S Jay Hartsdale, US 36 691
Hamann, Hendrik F Yorktown Heights, US 205 3682
Klein, Levente I Tuckahoe, US 28 290
Schappert, Michael A Wappingers Falls, US 27 439
Singh, Prabjit Poughkeepsie, US 93 1198

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