VACUUM PROCESSING APPARATUS
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United States of America Patent
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app pub date -
Apr 28, 2014
filing date -
Oct 28, 2011
priority date (Note) -
Abandoned
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Abstract
A vacuum processing apparatus includes a process chamber, a load lock chamber connected to the process chamber, and a transfer device configured to transfer a substrate from the load lock chamber to the process chamber. The transfer device is configured to move the substrate by gravity. The transfer device includes a guide configured to form a transfer path when the substrate moves by the gravity, and a stopper configured to limit movement of the substrate by the gravity when holding the substrate, and cancel the limitation when moving the substrate.
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