Gas delivery system for outputting fast square waves of process gas during semiconductor processing
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United States of America Patent
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Sep 20, 2016
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app pub date -
Feb 18, 2014
filing date -
Feb 15, 2013
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Abstract
A wave generation component during an off cycle when the on-off valve is closed to build pressure from the process gas in an accumulation volume. During an on cycle when the on-off valve is open the wave generation component releases the process gas according to a time constant. A flow restrictor installed downstream in a throat of the on-off valve, outputs the rapid square waves to the conduit at a predefined magnitude. The flow restrictor is selected to have an impedance that is high enough to significantly raise the time constant during the on cycle such that pressure decay in each square wave pulse over the on cycle decreases to within a tolerance, wherein the time constant is at least in part a function of the flow restrictor impedance.
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